T.I.S. Microroughness Measurement in the Optical Shop

J. Guerra
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Abstract

Optical shops are increasingly called upon to characterize not only the optical figure and macrodefects (scratch/dig) of their work but the microroughness as well. Whether the optical surface is for imaging or non-imaging applications (e.g., calendering rolls), performance depends upon meeting the specified surface microroughness. The challenge of measuring roughness of 100Å RMS co less than 10Å RMS has been met by a myriad of surface interogation techniques employing most known surface interaction phenomena, including light scattering.
光学车间的T.I.S.微粗糙度测量
越来越多的光学商店被要求不仅要描述光学图形和宏观缺陷(划痕/凹坑),而且要描述其工作的微观粗糙度。无论光学表面是用于成像还是非成像应用(例如,压延辊),其性能取决于满足指定的表面微粗糙度。测量100Å RMS小于10Å RMS的粗糙度的挑战已经通过使用大多数已知的表面相互作用现象(包括光散射)的无数表面嵌入技术来解决。
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