Fabrication of thin film piezoelectric ultrasonic transducer

H. Mohamed, D. Polla, E. Ebbini, S. Zurn
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引用次数: 1

Abstract

This paper presents the fabrication, and testing results of a MEMS ultrasonic transducer, based on thin film PZT membrane. The PZT structure enables the actuation and the sensing of the ultrasonic waves. The transducer was tested for impedance characteristics, fundamental resonance modes. This work shows the potential of thin film PZT for ultrasonic imaging transducers. The novel microfabrication process minimizes the size of the transducers, the spacing between the individual devices while minimizing the cross talk. The use of the PZT allows for maximum sensitivity. A two-dimensional array, like the one demonstrated in this work can be potentially used for coronary artery imaging.
薄膜压电超声换能器的研制
本文介绍了一种基于PZT薄膜的MEMS超声换能器的制作方法和测试结果。压电陶瓷结构实现了超声波的驱动和感应。测试了换能器的阻抗特性、基本谐振模式。这项工作显示了薄膜压电陶瓷作为超声成像换能器的潜力。新颖的微加工工艺最大限度地减少了换能器的尺寸,单个设备之间的间距,同时最大限度地减少了串扰。PZT的使用允许最大的灵敏度。一个二维阵列,就像在这项工作中展示的那样,可以潜在地用于冠状动脉成像。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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