Thermally Evaporated GaSb Thin Film Grown From TVDS Method for Optical Applications

F. Ali, J. J. Mahakud, S. Kamilla
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Abstract

In this work, a new crystal growth technique has been used i.e. Thermo Vertical Direction Solidification (TVDS), designed and developed in our laboratory to grow undoped GaSb ingot from high purity Ga and Sb host materials. The grown ingot was then put inside thermal evaporation unit to deposit GaSb film on quartz substrate. The structural study of the grown GaSb thin film from the XRD characterization revealed that grown film was polycrystalline in nature. The electrical properties like carrier concentration, Hall-coefficient, mobility, resistivity etc of the film were studied by performing Hall-Effect measurements by Van Der Pauw method. It was found that for eutectic GaSb compound, thermal-evaporation is very much suitable method to deposit GaSb thin film with less complexity. Therefore, two terminal devices can be fabricated from the GaSb films by adding coplanner electrodes to design and investigate optical devices like photo detectors, optical communication devices, infrared diodes etc.
用TVDS法生长用于光学的热蒸发GaSb薄膜
本研究采用了一种新的晶体生长技术,即热垂直定向凝固(TVDS),该技术是由我们实验室设计和开发的,可以在高纯Ga和Sb主体材料中生长未掺杂的GaSb铸锭。然后将生长好的钢锭放入热蒸发装置中,在石英衬底上沉积GaSb膜。通过XRD表征对生长的GaSb薄膜进行了结构研究,发现生长的薄膜具有多晶性质。采用范德保法进行霍尔效应测量,研究了薄膜的载流子浓度、霍尔系数、迁移率、电阻率等电学性能。研究发现,对于共晶的GaSb化合物,热蒸发法是制备GaSb薄膜的理想方法,且制备工艺简单。因此,在GaSb薄膜上加入共规划电极,可以制成两个终端器件,用于设计和研究光电探测器、光通信器件、红外二极管等光学器件。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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