Holographic lithography for grating coupler fabrication in gallium nitride grown on sapphire substrate

Proceedings of 2005 International Students and Young Scientists Workshop Photonics and Microsystems, 2005. Pub Date : 2005-07-07 DOI:10.1109/STYSW.2005.1617790

R. Dylewicz, S. Patela, R. Paszkiewicz, M. Tlaczala, S. Bartkiewicz, A. Miniewicz

引用次数: 2

Abstract

The paper reports on holographic lithography for fabrication of grating coupler in gallium nitride grown on sapphire substrate. The impact of the speckle effect is especially significant when further etching process is taken into consideration

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蓝宝石衬底氮化镓光栅耦合器全息光刻技术

本文报道了在蓝宝石衬底上生长氮化镓的光栅耦合器的全息光刻技术。当考虑进一步的蚀刻工艺时，散斑效应的影响尤为显著

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Proceedings of 2005 International Students and Young Scientists Workshop Photonics and Microsystems, 2005.

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