Microfabrication of vacuum compatible millimeter wave sources

Abstract

InnoSys is developing a fabrication techniques for manufacturing of millimeter wave vacuum electron devices from semiconductor manufacturing and micromachining. SU-8 RF circuits and PPM magnetic circuits are fabricated by LIGA methods. The circuit fabrication starts with a flat substrate and adds and removes material defined by lithographic masks. Fabricated circuits are integral parts of the vacuum envelope in millimeter wave devices.