Thick-Film Technology for Energy Harvesting

Abstract

Energy harvesting is one of the latest possible applications of thick-film technology. In order to replace traditional batteries, energy harvesters are being developed that provide clean and renewable energy sources. Vibration-based harvesting is one of the possible solutions where vibration to electricity conversion mechanism can be implemented using piezoelectric transduction compatible with thick-film technology. Thick-film piezoelectric materials could be used to form free-standing structures similar to traditional cantilever structures that when stressed generate electrical charges. Unlike structures formed using micromachining and thin-film technology, thick-film energy harvesters may provide free-standing structures with thicknesses greater than 50 μm covering area from several mm2 to several cm2. There are several challenges in realization of such thick-film free-standing structures that have to be addressed. They involve both processing conditions and operation in bending mode. This paper aims to address these challenges and explore feasibility of reliable formation and exploitation of thick-film piezoelectric micro generators.