Pulsed laser scanning deposition of diamondlike thin films

Abstract

Diamondlike thin films were prepared by irradiation of high purity graphite with a high power density( 1.178 x I 09 Watt I cm2 ) laser (XeCI 308 nm) in the vacuum ( I x 10-s Torr) . Raman spectra show the thin film with the properties of diamond, the scatter peak is in round 1330 cm-1 . The IR spectra show the thin film containing C-H bonds, and the ratio ofH to C is about 45%. The resistivity and optical energy gap of the thin film are 1.89 x 106 .0 .cm and 1.55 e. V, respectively. Keywords: Pulsed Laser deposition, Diamondlike thin film, Raman spectra.