Insulator charging simulation

Abstract

The problem of the charge distribution within an insulator bombarded by a narrow electron beam is studied using the Monte Carlo technique. In contrast to the conductor or semiconductor case, the electron-insulator interaction is shown to depend closely on the specimen environment; has been taken into account; this assumption is valuable if the specimen is sufficiently large and thick, and if the working distance is not too short. The working distance acts on the spreading of the incident beam via the surface potential.<>