Design and record-high experimental demonstration of compact and high-sensitive SW-MS BG refractive index sensor on SOI platform

Abstract

Sub-wavelength multi-slot Bragg grating (SW-MS BG) waveguide sensors were developed. The structures were designed for compactness and high sensitivity. The fabricated device demonstrated a record-high sensitivity of 730 nm/RIU with a length of 9.5 µm.