An application of entity-relationship data modeling techniques to the automated manufacturing process

Abstract

An entity-relationship (E-R) model has been developed to generically represent aspects of process information flow in a hierarchical automated manufacturing facility. The facility is expected to be networked and to consist of a global controller, local controllers, etc. and IC processing equipment, organized in a hierarchical fashion. The development of the model is presented through a case study of an automated semiconductor manufacturing facility. In developing the model, subschemas are first developed for the various component modules in the facility. The modules are then incorporated using a form of E-R model clustering and integration techniques into a schema for the entire facility. The generic structural properties of the schema are clearly evident. The development and application of E-R constructs to model time sequencing and ordering aspects of process information flow in the facility are potential areas of future research.<>