Performance of an Infrared Phase-Shifting Interferometric System

H. Stahl
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Abstract

An infrared phase-shifting interferometric system has been developed at the University of Arizona Optical Sciences Center. It is a compact, self-contained, easy to align and operate, next generation optical shop instrument. The principle applications for an infrared interferometer are: 1) inspection of infrared materials in transmission for index homogeneity and internal defects, 2) interferometry of surfaces, such as an asphere, whose slopes are too steep for the fringes to be resolved by a visible interferometer, and 3) interferometry of surfaces that are too rough to be tested at visible wavelengths. The advantages of operating an infrared interferometer in the phase-shifting mode are: 1) improved wavefront phase measurement accuracy and resolution 2) the measurement is independent of the beam irradiance distribution and the interferogram fringe contrast, and 3) the wavefront can be sampled and analyzed rapidly over a large two dimensional area.
红外移相干涉系统的性能研究
美国亚利桑那大学光学科学中心研制了一种红外移相干涉测量系统。它是一种紧凑,独立,易于校准和操作的下一代光学商店仪器。红外干涉仪的主要应用是:1)检查红外材料在传输中的折射率均匀性和内部缺陷;2)干涉测量表面,如非球面,其斜率太陡,条纹无法用可见光干涉仪分辨;3)干涉测量太粗糙,无法在可见光波长下测试的表面。在移相模式下操作红外干涉仪的优点是:1)提高了波前相位测量的精度和分辨率;2)测量不受光束辐照度分布和干涉图条纹对比度的影响;3)可以在大的二维区域内快速采样和分析波前。
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