{"title":"Focus variation","authors":"Claudia Repitsch, K. Zangl, F. Helmli, R. Danzl","doi":"10.1088/978-0-7503-2528-8ch3","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":115010,"journal":{"name":"Advances in Optical Surface Texture Metrology","volume":"26 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2020-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Advances in Optical Surface Texture Metrology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1088/978-0-7503-2528-8ch3","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}