DSAR: DSA aware Routing with Simultaneous DSA Guiding Pattern and Double Patterning Assignment

Abstract

Directed self-assembly (DSA) is a promising solution for fabrication of contacts and vias for advanced technology nodes. In this paper, we study a DSA aware detailed routing problem, where DSA guiding pattern assignment and guiding pattern double patterning (DP) compliance are resolved simultaneously. We propose a net planning technique, which pre-routes some nets based on their bounding box positions, to improve both metal layer and via layer qualities. We also introduce a new routing graph model with DSA and DP design rule considerations. The DSA and DP aware detailed routing is then performed based on the net planning result, followed by a post-routing optimization on DSA guiding pattern assignment and decomposition. The experimental result demonstrates that our proposed approach can achieve promising DSA and DP friendly layout, i.e., conflict free on DSA guiding pattern with double patterning assignment for via layer. In addition, our proposed detailed router is able to effectively reduce 20% via number and 15% total wirelength than one recent DSA aware detailed router.