Fabrication of optical sensors based on porous silicon microcavities with embedded conjugated polymers for explosives detection

Abstract

In this study we have investigated the technological features of fabrication and photophysical properties of the optical sensors based on porous silicon microcavities for explosives detection. We have explored the problem of the optimal etching parameters selection as well as oxidation in order to obtain stable porous silicon microcavities in the visible region. Various methods for the embedding of conjugated polymers of PPV (polyphenylenevinylene) derivatives into the porous structure of microcavities have been considered. The luminescent properties of polymers embedded in porous silicon microcavities have been investigated and sensitivity to the explosives vapors has been demonstrated.