Micro elements for interrogating magnetoelastic sensors

Abstract

This paper reports a new approach for interrogating a magnetoelastic sensor's resonant frequency. Previously, the frequency of a magnetoelastic sensor was measured by using a large-scale solenoid coil of at least some millimeters both in diameter and length. Planar structures of straight-line and rectangular spiral coil are designed, fabricated and tested to interrogate the resonant frequency of a magnetoelastic sensor. A sensor of 4 mm length is measured to have a resonant frequency of 551 kHz in air. The ability to interrogate a magnetoelastic sensor with such microscale elements is a step towards the miniaturization of a magnetoelastic sensor system and integration of such a system in a microfluidics device.