Evaluation of Photosensitive Performance of Different Structured UTBB MOSFET

Abstract

This paper provided a photosensitive performance evaluation of UTBB MOSFET with different structures. The UTBB MOSFET can achieve photosensitive function by integrating a doping well or photodiode under the BOX. With doping well under the BOX, the UTBB MOSFET is more sensitive to light. On the other hand, the saturation exposure time of UTBB with photodiode is longer.