{"title":"Negative photoresists and integrated optics","authors":"J. Clair, J. Frejlich, J. Jonathan, L. Torres","doi":"10.1088/0335-7368/6/5/307","DOIUrl":null,"url":null,"abstract":"Physicochemical treatments are proposed to optimize the properties of negative photoresists. These materials are used to realize phase filters and components for integrated optics.","PeriodicalId":286899,"journal":{"name":"Nouvelle Revue D'optique","volume":"28 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1975-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"7","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Nouvelle Revue D'optique","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1088/0335-7368/6/5/307","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 7
Abstract
Physicochemical treatments are proposed to optimize the properties of negative photoresists. These materials are used to realize phase filters and components for integrated optics.
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