D. Lin, Robert MacDonald, J. Popp, Matthew Alberda, E. Andarawis, M. Aimi
{"title":"Low-Cost Navigation-grade MEMS Fabrication Platform to Enable PNT Innovations","authors":"D. Lin, Robert MacDonald, J. Popp, Matthew Alberda, E. Andarawis, M. Aimi","doi":"10.1109/PLANS53410.2023.10140000","DOIUrl":null,"url":null,"abstract":"GE Research has developed a low-cost inertial MEMS process flow to support navigation-grade inertial sensor fabrication called ‘Polaris’ process. With a total of six mask layers, GE Polaris features thick silicon on insulator (SOl) with a 20 to 200 μm device layer, 30:1 high aspect ratio etching, and wafer level vacuum sealing at mTorr with through silicon via technology. The GE multiple-ring gyroscope (MRG) fabricated by the Polaris process has demonstrated navigation-grade performance with proven extreme-temperature reliability and successful integration to a MEMS IMU prototype. GE, through its GE Microfab is now offering Polaris as a foundry process, open to the PNT community.","PeriodicalId":344794,"journal":{"name":"2023 IEEE/ION Position, Location and Navigation Symposium (PLANS)","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2023-04-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2023 IEEE/ION Position, Location and Navigation Symposium (PLANS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/PLANS53410.2023.10140000","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
GE Research has developed a low-cost inertial MEMS process flow to support navigation-grade inertial sensor fabrication called ‘Polaris’ process. With a total of six mask layers, GE Polaris features thick silicon on insulator (SOl) with a 20 to 200 μm device layer, 30:1 high aspect ratio etching, and wafer level vacuum sealing at mTorr with through silicon via technology. The GE multiple-ring gyroscope (MRG) fabricated by the Polaris process has demonstrated navigation-grade performance with proven extreme-temperature reliability and successful integration to a MEMS IMU prototype. GE, through its GE Microfab is now offering Polaris as a foundry process, open to the PNT community.