Temperature stability of surface acoustic wave resonators on the in-plane rotated 33/spl deg/Y-cut quartz

Abstract

We present surface acoustic wave resonators on the in-plane rotated 33/spl deg/Y-cut quartz with improved temperature stability. We calculate the frequency temperature characteristics of Rayleigh waves using finite element method under the condition of Euler angle (0, 123, 39-44). We confirmed the accuracy of calculated temperature coefficients by experiments. We also measured the resonance characteristics of prototype SAW resonators.