Trace moisture detection using near infrared diode lasers

2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497) Pub Date : 2000-07-24 DOI:10.1109/LEOSST.2000.869710

C. Hovde, J. A. Silver

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引用次数: 2

Abstract

The measurement of trace concentrations of water vapor is important in many industrial applications, especially semiconductor fabrication. A variety of methods exists for measuring water vapor at concentrations approaching one nmole/mole (one ppb). We have chosen to focus on wavelength modulation spectroscopy (WMS) as a practical method to achieve sufficient sensitivity. WMS is a variation of transmission spectroscopy, and thus it shares the calibration benefits of other Beer's Law techniques. By rapidly modulating the laser wavelength, laser 1/f noise is avoided, so very small changes in laser power can be measured. When WMS is combined with a multiple pass absorption cell, ultrasensitive detection of water vapor is possible. This approach has the desired combination of sensitivity and accuracy while enjoying the benefits of rugged communications-type diode lasers.

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利用近红外二极管激光器进行微量水分检测

痕量水蒸气浓度的测量在许多工业应用中是重要的，特别是半导体制造。测量水汽浓度接近1纳摩尔/摩尔(1 ppb)的方法多种多样。我们选择波长调制光谱学(WMS)作为实现足够灵敏度的实用方法。WMS是透射光谱学的一种变体，因此它具有其他比尔定律技术的校准优势。通过快速调制激光波长，避免了激光1/f噪声，因此可以测量激光功率的微小变化。当WMS与多通道吸收池相结合时，可以超灵敏地检测水蒸气。这种方法具有所需的灵敏度和精度的组合，同时享受坚固的通信型二极管激光器的好处。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497)

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