Micro-diaphragm performance analysis for polyimide diaphragm

Abstract

This paper presents a micro-diaphragm performance analysis for optical sensor for human pulse pressure detection. The effect of diaphragm radius and diaphragm thickness on the static and frequency responses were investigated. It can be concluded that the polyimide micro-diaphragm with a radius of 90µm and thickness of 4µm has achieved the optimum performance in term of the sensitivity, flexural rigidity and resonance frequency.