COMSOL modeling of Hall sensors efficiency

Abstract

In this paper we present a finite element analysis routine for modeling of semiconductor Hall sensors. Their efficiency is studied varying the base semiconductor material. More specifically, 2D COMSOL semi-conductor model is initially employed to extract the properties of the conductive channel. Subsequently a 3D COMSOL DC model is used to perform the studies regarding the Hall sensor efficiency. Hall sensors of identical topology and doping levels are studied in a comparative manner.