Carbon Heating Tube Used for Rapid Heating System for Semiconductor Annealing

Abstract

We report a new heating system with a carbon heating tube (CHT) which was made by a quartz tube filled with carbon particles and Ar gas. A 60-mm long and 4-mm diameter CHT was set in a cavity in which 2.45-GHz microwave was introduced. Via complete absorption of the input microwave power by carbon in the CHT during multi-reflection of microwave in the cavity, the CHT was effectively heated to 1279°C at a microwave power of 200 W for 33 s. Crystallization of a 50-nm-thick amorphous silicon thin film formed on glass substrate was demonstrated by mechanically moving the silicon sample just below the heated CHT. A high crystalline volume ratio of 0.9 was achieved.