Aspherical ELID Grinding Technique for X-ray Mirrors

Abstract

X-ray optics is advancing rapidly and being applied to numerous fields. X-ray mirrors may serve as one of the most important devices giving tremendous influence on the performance of a whole system. X-ray mirrors require for higher precision than any other parts. But the technique which produces such mirrors has yet to be established. In this paper the applications of the ELID grinding technique1),2), which is known widely as a method for producing high precision ground surfaces in a short period of time, are described for X-ray mirrors.