J. Brindley, G. Ltd.
{"title":"Modelling and Analytical Stability Analysis of Feedback Controlled Reactive Sputter Processes","authors":"J. Brindley, G. Ltd.","doi":"10.14332/svc19.proc.0039","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":220126,"journal":{"name":"Annual Technical Conference Proceedings","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Annual Technical Conference Proceedings","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.14332/svc19.proc.0039","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0