Line-Loss and Size Reduction Techniques for Millimeter-Wave RF Front-End Boards by Using a Polyimide/Alumina-Ceramic

M. Nakatsugawa, A. Kanda, H. Okazaki, K. Nishikawa, M. Muraguchi
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引用次数: 1

Abstract

This paper proposes a concept for constructing low- loss and small-size millimeter-wave RF front-end boards by using a polyimide/alumina-ceramic multilayer configuration. The thick polyimide layer enables us to design low-loss wide microstrip lines (MS's). Moreover, the board size can be reduced by compactly arranging all RF and dc lines in the intermediate layers of the polyimide/alumina-ceramic substrate. The size of a prototype board designed for the quasi-millimeter-wave region is 30 mm 30 mm. In experiments, it showed 23.2-dB linear gain and 7.4-dBm RF output power in transmitter (TX) mode, and 3.1-dB linear gain and 20.1-dBm IF output power in receiver (RX) mode. These performance levels agree well with predicted values. This paper further discusses applications to the integration of passive circuits fabricated in the substrate. The proposed configuration has enough potential to integrate all monolithic microwave integrated circuit (MMIC) chips, dc-bias integrated circuits (IC's), and passive circuits, and can improve the total performance in terms of the RF characteristics, board size, and fabrication cost. conductor wafers and lead to cost reduction. They adopt thin polyimide layers to form thin film microstrip lines (TFMS's). Their patterning flexibility on the semiconductor chip makes it possible to design various kinds of functional circuits and to connect them within a small area, and results in fabrication of multifunctional one-chip MMIC's (3). Nevertheless, it is difficult to integrate circuits fabricated by different device processes into one circuit module because all unit circuits in a 3-D MMIC share the same semiconductor substrate. The ability to integrate different types of active devices improves the total circuit performance and increases the field of 3-D
聚酰亚胺/氧化铝陶瓷毫米波射频前端板的线损和尺寸减小技术
本文提出了一种利用聚酰亚胺/氧化铝-陶瓷多层结构构建低损耗小尺寸毫米波射频前端板的概念。厚聚酰亚胺层使我们能够设计低损耗的宽微带线。此外,通过在聚酰亚胺/氧化铝陶瓷衬底的中间层中紧凑地排列所有RF和dc线,可以减小电路板尺寸。准毫米波区设计的原型板尺寸为30mm ~ 30mm。在实验中,发射器(TX)模式下的线性增益为23.2 db,射频输出功率为7.4 dbm;接收器(RX)模式下的线性增益为3.1 db,中频输出功率为20.1 dbm。这些性能水平与预测值非常吻合。本文进一步讨论了在衬底上制造的无源电路集成中的应用。所提出的配置有足够的潜力集成所有的单片微波集成电路(MMIC)芯片,直流偏置集成电路(IC)和无源电路,并可以改善射频特性,板尺寸和制造成本方面的总体性能。导体晶圆和导致成本降低。他们采用薄聚酰亚胺层形成薄膜微带线(TFMS)。它们在半导体芯片上的图形灵活性使得设计各种功能电路并在小区域内连接它们成为可能,并导致多功能单芯片MMIC的制造(3)。然而,由于3- d MMIC中的所有单元电路共享相同的半导体衬底,因此很难将不同器件工艺制造的电路集成到一个电路模块中。集成不同类型有源器件的能力提高了电路的总体性能,并增加了三维领域
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