Electrostatic actuation of a silicon membrane to control the injected fluid volume by a micro pump

Abstract

This paper is to study the phenomenon of electrostatic actuation of a silicon membrane for injecting a sufficient quantity of fluid and in particular medication with a micro pump. The latter becomes a void of first choice for the treatment of diseases such as diabetes that requires the use of a syringe for insulin injection. With the development of MEMS technology, the injection of insulin is transmitted through a micro pump located outside the human body and connected to a subcutaneous cannula to control the dosage depending on the need body. The idea is to take the patient's blood glucose and compared with a reference value. Based on the obtained difference, an electronic system calculates the volume of insulin and the number of units required to be injected to stabilize blood glucose levels. The micropump is constituted by a silicon membrane electrostatically actuated by a DC voltage V. This actuation causes deformation of the membrane leading to the opening of the first micro valve and the introduction of a unit volume in the chamber internal micro pump through the first pipe. The annulment of the voltage V leads to the return of the membrane at equilibrium. This causes the closure of the first valve and the opening of the second micro valve which will inject the fluid into the second pipe.