Automation experiences on a new 1 micron production fab

Abstract

The authors describe an operational automation system that addresses the need for more consistent, repeatable process execution without mistakes. This system manages and controls material flow throughout the semiconductor ASIC (application-specific integrated circuit) manufacturing process. The authors describe the system implementation experience and the lessons learned. Issues of process 'step/equipment validation', work in process, storage management, material transport, and CIM (computer-integrated manufacturing) system integration are discussed. Experience in a high-volume production environment is described.<>