Controllable bridge of the RF-MEMS: Static analysis

Abstract

This paper presents the design and the mechanical testing of the RF MEMS capacitive beam based on coplanar waveguide (CPW) design. The propose of this simulation is to make a comparative study on three different models (uniform bridge, Fixed-fixed flexure bridge and meander bridge) structures with four different materials (Nickel, Copper, Aluminum, and Gold). The simulation is obtained using comsol software. The proposed switch is considered as a moving membranes controlled by an applied DC voltage. The obtained results show that the Gold and Aluminum has the best displacement versus the applied voltage. The applied voltage of the model three based on meander modification becomes the third of the necessary voltage for the first model based on the uniform structure: [for example of the aluminum material: the pull in voltage equal to 47 V in model 1 and 15 V in model 3]. It is also observed that the low applied voltage corresponds Aluminium and Gold materials.