Thermal techniques to improve ZnO-based FBAR devices characteristics

Abstract

The paper presents some methods to improve characteristics of film bulk acoustic resonator (FBAR) devices. The FBAR devices were fabricated on Bragg reflectors. Thermal treatments were done by sintering and/or annealing processes. The measurement showed a considerable improvement of return loss (S11) and quality factor (Qs/p). These thermal treatment techniques seem very promising for enhancing FBAR resonance performance.