Imaging Using Mems Electron Microscope

Abstract

The article presents imaging results performed using a MEMS electron microscope setup. Three different electron detectors were developed and tested. The detectors integrated with a scanning octupole system were placed inside the JEOL JSM IT-100 SEM sample chamber. Using the SEM electron beam, the test images were obtained, confirming the usefulness of all three detectors. Moreover, a comparison between images obtained using the JEOL microscope and MEMS EM setup is presented.