Contactless characterization of microwave integrated circuits by device internal indirect electro-optic probing

Abstract

Deals with a contactless working test system for the internal test of monolithic microwave integrated circuits (MMIC) based on both: III-V-semiconductor and Si-substrate material. This electro-optic test system determines the electrical field above the test-point within the MMIC. Measurements demonstrate the capability of this test system for device internal function control and failure analysis.<>