Overview of Computer Simulation Techniques for Field Emission Study

2006 19th International Vacuum Nanoelectronics Conference Pub Date : 2006-07-01 DOI:10.1109/IVNC.2006.335430

Z. Cui

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Abstract

In field emission study, computer simulations are used to basically acquire two types of information: field distribution around a field emitter and charged particles emission from the emitter, which includes tracing charged particle trajectories and evaluating space charge effect. These involve solving Maxwell equations, Lorenz force equations and calculating emission current from the Fowler-Nordheim equation. There are well established numerical methods to solve these equations, such as finite difference method (FDM), finite element method (FEM) and boundary element method (BEM). In term of simulating field distribution, there are many commercial or home-made software packages and programmes, ranging from much generalized software such as MATLAB to much specialised software such as SOURCE. The MATLAB and the SOURCE are all FEM-based software. FEM is flexible in field simulation because unstructured meshing technique can be used to fit to complicated shape of field emitters. However, it is more difficult to calculate electron trajectories in a FEM-based mesh domain than in a FDM-based mesh domain. Therefore the early simulation programmes were primarily FDM-based

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场发射研究的计算机模拟技术综述

在场发射研究中，计算机模拟主要获取两类信息:场发射体周围的场分布和发射体的带电粒子发射，包括跟踪带电粒子的运动轨迹和评估空间电荷效应。这包括求解麦克斯韦方程、洛伦兹力方程和从Fowler-Nordheim方程计算发射电流。求解这些方程的数值方法有有限差分法(FDM)、有限元法(FEM)和边界元法(BEM)等。在模拟场分布方面，有许多商业或自制的软件包和程序，从非常通用的软件如MATLAB到非常专业的软件如SOURCE。MATLAB和SOURCE都是基于有限元的软件。有限元法在场模拟中具有灵活性，可以采用非结构网格技术拟合复杂的场发射体形状。然而，在基于fem的网格域中计算电子轨迹比基于fdm的网格域要困难得多。因此，早期的模拟程序主要是基于fdm的

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2006 19th International Vacuum Nanoelectronics Conference

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