Indium Phosphide Optical MEMS for Chemical and Biological Sensing

Abstract

We present a resonant cantilever sensor for use in chemical and biological sensing applications. Electrostatically actuated suspended indium phosphide (InP) waveguides are used as the sensing cantilevers. This sensor uses an integrated optical detection scheme which eliminates the need for free space optical components seen in traditional systems. Discussions on device design as well as data collection methods are presented. Mass sensitivity in the range of Deltam = 6.6times10-15 g is reported, comparable to similar cantilever sensor designs. Integration of waveguide cantilever sensors with on chip optical sources and detectors is also discussed