A collaborative scheduling strategy for twin fab

Abstract

This paper proposes a collaborative scheduling strategy for twin fab in semiconductor manufacturing, which consists of the job scheduling strategy and the equipment scheduling strategy. The former considers the WIP balance of production lines, the load of continuous processing areas, equipment load, the difference of optimal equipment state value of each fab and the transportation time of job, etc. The latter considers the factors such as equipment load, the due date of jobs, the occupation time of a job on equipment and so on. The simulation results show that the proposed strategy can effectively improve the performance indexes of total throughput, average cycle time and on time delivery rate.