Multi-Criterial Assessment of the Uniformity of the Electrical Potential of Micro-Films

Abstract

We propose a method of characterization and assessment of the uniformity of the surface properties of samples based on a set of derived parameters. Local (sliding window) variance, Allan and Hadamard variances and centers of potential for measurement lines are used to assess the uniformity. The method is exemplified for the potential of piezoelectric thin (nano) films, but it is applicable to a large range of properties.