Shear horizontal surface acoustic wave sensor measurement system for liquid toward wireless and passive applications

Abstract

A liquid-phase sensor is realized using shear horizontal surface acoustic wave (SH-SAW) sensor devices. One feature of the SH-SAW sensor is to realize a wireless and passive measurement system. In this paper, first, a new measurement system is proposed. Its validity was confirmed by comparing it with a numerical solution. Secondly, online software was used to calculate phase and amplitude from the SH-SAW sensor responses. The results indicate that the online software is suitable to evaluate the sensor responses.