Electromagnetic MEMS Based Micro-Power Generator

Abstract

This paper presents a novel electromagnetic MEMS based micro-power generator with power density of 95 muW/cm3. The power density under careful design can be doubled to 190 muW/cm3. In addition, a complete design procedure for the micro-power generation system is presented. The procedure starts from the load power and voltage requirements and going backward in order to design the structure of the micro-power generator based on the available vibration input source (under known acceleration and fundamental resonant frequency). An example is assumed in order to demonstrate the design steps