SAW-properties of langasite at high temperatures: Measurement and analysis

2009 3rd International Conference on Signals, Circuits and Systems (SCS) Pub Date : 2009-11-01 DOI:10.1109/ICSCS.2009.5414173

I. Shrena, D. Eisele, E. Mayer, L. Reindl, J. Bardong, M. Schmitt

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引用次数: 9

Abstract

The measurement range of temperature using SAW-devices is depending on the substrate material used in the measurements. This dependence is related to the temperature point, where the substrate loses its piezoelectric properties. This occurs by the SAW-materials such as quartz and lithium niobate at about 570°C or 350°C, respectively. The piezoelectric material langasite (La3Ga5SiO14) has a thermodynamically stable phase and do not lose its piezoelectric properties up to its melting point at about 1470 °C and can be used for SAW devices at high temperatures. This paper presents the measurements of acoustical parameters of langasite up to 750°C. Langasite is used as substrate in the measurements with Euler angles (0°, 138.5°, 26.6°) and two different platinum (Pt) layer heights (45 nm and 75 nm) top of a zirconium (Zr) adhesion layer (4 nm). The investigated acoustic properties of langasite are group and phase velocity, propagation loss, and electromechanical coupling coefficient as functions of temperature. The measured data is analyzed using a special signal processing algorithm to obtain these acoustic properties of the Langasite.

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高温下langasite的saw性质:测量与分析

使用saw器件的温度测量范围取决于测量中使用的衬底材料。这种依赖关系与温度点有关，在温度点，衬底失去其压电特性。石英和铌酸锂等saw材料分别在570°C或350°C左右发生这种情况。压电材料langasite (La3Ga5SiO14)具有热力学稳定的相，并且在熔点约1470℃时不会失去其压电性能，可以用于高温下的SAW器件。本文介绍了在750°C温度下对langasite的声学参数的测量。在欧拉角(0°，138.5°，26.6°)和两种不同的铂(Pt)层高度(45 nm和75 nm)的锆(Zr)粘附层(4 nm)顶部测量中，使用Langasite作为衬底。研究了langasite的声学特性，包括群速、相速、传播损耗和机电耦合系数随温度的变化。利用一种特殊的信号处理算法对测量数据进行分析，得到了Langasite的这些声学特性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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2009 3rd International Conference on Signals, Circuits and Systems (SCS)

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