Charactarization of Formaldehyde-Free Electro-Less Copper Plating for Semi-Additive Process

M. Takeuchi, Tomoharu Nakayama, Hisamitsu Yamamoto
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引用次数: 2

Abstract

Typically, industrial electroless copper plating solutions use formaldehyde as a reducing agent. However, since formaldehyde has a strong odor and is a carcinogenic substance, it has an adverse effect on the working environment and the human body. Therefore, an electro-less copper plating solution containing no formaldehyde is desired. We have researched and developed a formaldehyde-free electro-less copper plating solution and evaluated its properties for applications such as panel level package (PLP). Price is the main reason for selecting agents with reducing power to copper for use in the plating market. We promoted to develop the plating solution using sodium hypophosphite as a reducing agent, which is the next least expensive after formalin solution. The reducing agent used in this plating solution has low catalytic activity for copper. As a result, when the palladium catalyst on the resin is covered with copper plating, the plating deposition rate is reduced. In order to prevent the deposition reaction from stopping during plating, a metal salt with high catalytic activity for this reducing agent is plated. The method of adding to the liquid was carried out. As a result, the bath stability of the development bath is excellent because no Cannizzaro reaction or disproportionate reaction of the first copper ion occurs, unlike ordinary electroless copper plating solutions. This is a major advantage in terms of running costs and requirements for ancillary the plating equipment. When the characteristics of the plating film by development bath were examined, the internal stress was found to be as low as 150 MPa on the tensile side. The adhesion to the ABF resin was high, ranging from 500 to 700 gf/cm. Also it exhibits excellent plating deposition inside blind via hole (BVH) which is equivalent to that of general electro-less copper plating solution, it can be applied to semi-additive process package boards where electro-less copper plating film is etched.
半添加剂无甲醛化学镀铜工艺的表征
通常,工业化学镀铜溶液使用甲醛作为还原剂。但是,由于甲醛具有强烈的气味,是一种致癌物质,对工作环境和人体都有不利影响。因此,需要一种不含甲醛的化学镀铜溶液。我们研究并开发了一种无甲醛的化学镀铜溶液,并评估了其在面板级封装(PLP)等应用中的性能。价格是选择对铜具有还原力的药剂用于电镀市场的主要原因。我们推动了以次亚磷酸钠为还原剂的镀液的开发,这是仅次于福尔马林溶液的最便宜的镀液。该镀液中使用的还原剂对铜的催化活性较低。因此,当树脂上的钯催化剂被镀铜覆盖时,镀层沉积速率降低。为了防止在电镀过程中沉积反应停止,电镀了对该还原剂具有高催化活性的金属盐。进行了加液的方法。因此,与普通化学镀铜溶液不同,显影液的镀液稳定性非常好,因为不会发生Cannizzaro反应或第一铜离子的不成比例反应。这在运行成本和对辅助电镀设备的要求方面是一个主要优势。对显影液镀膜的特性进行了测试,发现拉伸侧的内应力低至150 MPa。与ABF树脂的结合力较高,为500 ~ 700 gf/cm。在盲孔(BVH)内具有与一般化学镀铜液相当的优良镀层沉积,可用于化学镀铜膜蚀刻的半添加剂工艺封装板。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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