Tiny Multilayer Deformable Mirrors

2006 International Workshop on Laser and Fiber-Optical Networks Modeling Pub Date : 2006-12-04 DOI:10.1109/LFNM.2006.252061

T. Cherezova, A. Sobolev, A. Kudryashov, Y. Sheldakova, V. Samarkin

引用次数: 0

Abstract

Formation of the given laser beam intensity and phase is an important practical and scientific problem, bimorph flexible mirror is one of the most widely used devices for this purpose. We present a new approach of multilayer bimorph mirrors and a numerical model to simulate them, based on the finite elements method. The multilayer mirror consists of a substrate and a number of PZT layers

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微小的多层可变形镜

给定激光束强度和相位的形成是一个重要的实际和科学问题，双晶圆柔性反射镜是用于此目的的最广泛的器件之一。本文提出了一种基于有限元法的多层双晶圆反射镜的新方法，并建立了对其进行数值模拟的模型。多层反射镜由衬底和若干PZT层组成

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2006 International Workshop on Laser and Fiber-Optical Networks Modeling

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