Simulation of Modeling Characteristics of Pumping Design Factor on Vacuum System

Abstract

Recently, with the development of advanced thin film devices comes the need for constant high quality vacuum as the deposition pressure is more demanding. It is for this reason our research seeks to understand how the variable design factors are employed in such vacuum systems. In this study, the effects of design factor applications on the vacuum characteristics were simulated to obtain the optimum design modeling of variable models on an ultra high vacuum system. The commercial vacuum system simulator, VacSim (multi) , was used in our investigation. The reliability of the employed simulator was verified by the simulation of the commercially available models of ultra high vacuum system. Simulated vacuum characteristics of the proposed modeling aligned with the observed experimental behavior of real systems. Simulated behaviors showed the optimum design models for the ideal conditions to achieve optimal pressure, pumping speed, and compression ratio in these systems. successful process managements. To achieve the reliable behavior in ultra high vacuum, it is essential to utilize the variable design factors on vacuum system. Applications of variable design factors on vacuum system has continued to grow with the advance of electronic devices. In this study, we investigated the effects of many design factors on vacuum characteristics of Turbo Molecular Pump(TMP) system. The acquired simulation results of the modeled TMP system suggested the optimum pumping factors for