Analysis of Experimental Data for 14-nm FinFETs

Abstract

In this paper we analyze measurements data of different 14 nm bulk FinFET structures – both n- and p-type. The analysis is based on the smoothness of the experimental characteristics. Smoothness is important for the subsequent parameter extraction procedures. It is estimated by taking first derivatives of the experimental curves and comparing them to their fitted polynomial. Calculations have been performed in Matlab.