H. Besaucele, A. Adnet, François Beau, Yacine Bouksou, Cédric Bellier, P. Ceccato, Maxime Chatelain, Nabil Douri, Hervé Dusserre, C. Dutems, Martin Heintzmann, K. Huet, Mathieu Lenormand, Bobby Lespinasse, Vincent Martinez, F. Mazzamuto, Antoine Melin, S. Perrot, David Rodrigues, L. Ruet, Olivier Sannier, G. Thébault, I. Toqué-Trésonne, Armand Vestraete, Karim Zekri
{"title":"High energy excimer laser system for nanosecond annealing of semiconductor devices","authors":"H. Besaucele, A. Adnet, François Beau, Yacine Bouksou, Cédric Bellier, P. Ceccato, Maxime Chatelain, Nabil Douri, Hervé Dusserre, C. Dutems, Martin Heintzmann, K. Huet, Mathieu Lenormand, Bobby Lespinasse, Vincent Martinez, F. Mazzamuto, Antoine Melin, S. Perrot, David Rodrigues, L. Ruet, Olivier Sannier, G. Thébault, I. Toqué-Trésonne, Armand Vestraete, Karim Zekri","doi":"10.1117/12.2522443","DOIUrl":null,"url":null,"abstract":"We present a high energy UV, 308 nm Xenon-Chloride excimer laser system providing a precisely controlled ultra-fast (nanosecond scale) thermal processing of semiconductor devices. The main elements of the system are described and key performance indicators are presented.","PeriodicalId":375593,"journal":{"name":"Advanced High-Power Lasers and Applications","volume":"5 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-01-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Advanced High-Power Lasers and Applications","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2522443","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
Abstract
We present a high energy UV, 308 nm Xenon-Chloride excimer laser system providing a precisely controlled ultra-fast (nanosecond scale) thermal processing of semiconductor devices. The main elements of the system are described and key performance indicators are presented.
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