On the control of scanning tunnelling microscopes

R. Banning, P.M.L.O. Sholte, A. E. Holman
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引用次数: 3

Abstract

The scanning tunnelling microscope (STM) can be used either for qualitative microscopy or for lithography. Furthermore, this microscope is a high precision instrument sensitive to disturbances originating from sound waves, vibrations and temperature variations. The quality of mechanical design is paramount for the scanning tunnelling microscopy technology. It is however not only the quality of mechanical design which defines the STM's operational reliability, it is also the quality of the STM's control system, as practical experience indicates. In this paper, attention is focused on improving the STM's control system.<>
扫描隧道显微镜的控制
扫描隧道显微镜(STM)既可用于定性显微镜,也可用于光刻。此外,该显微镜是一种高精度仪器,对来自声波,振动和温度变化的干扰非常敏感。机械设计的质量对扫描隧道显微技术至关重要。然而,实际经验表明,决定STM运行可靠性的不仅是机械设计的质量,还有STM控制系统的质量。本文的重点是改进STM的控制系统
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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