Systematic synthesis of nano- and micro-electromechanical systems

Abstract

Addresses and solves model development, simulation, analysis, control, and optimization problems which are critical in synthesis and design of high-performance NEMS and MEMS. It is illustrated that different concepts can be applied in modeling, and novel approaches must be developed in order to guarantee feasibility and applicability of mathematical models for consecutive steps, tasks, and problems. To analyze molecular dynamics and study nanostructures, high-fidelity modeling is approached using the three-dimensional charge density. For electromechanical devices, Maxwell's equations can be used. The lumped-parameter models, which lead to nonlinear differential equations, are applied in the preliminary analysis and design. It is illustrated that three-dimensional in the time domain high-fidelity modeling, simulation, and analysis can be achieved. To demonstrate the results, an illustrative example is provided. In particular, rotational micromotors are studied, modeled, controlled, and tested.