Modeling 3-dimensional electro thermal actuation of MEMS mirrors

Abstract

The micro mirror is a miniature device which can be used to modulate the light parameters. The light modulation is achieved by moving the micro mirror in the piston and tip-tilt mode of operation with the help of the actuators attached to each side of the mirror. This paper presents the results of COMSOL Multiphysics® modeling and study of two types of electro thermal actuators (ETA's) for 3D actuation of hexagonal MEMS micro mirrors. These actuators work on the principle of joule heating and hence their size, shape and composition determine the angular and vertical displacement. An array of this hexagonal mirror is intended to be used for maskless laser interferometric lithography (LIL) for realization of periodic structures.