A new integrated test structure for on-chip post-irradiation annealing in MOS devices

Abstract

We have developed a prototype test structure (named THERMOS) demonstrating the feasibility and the interest of the on-chip heating in a Silicon-On-Insulator technology. This circuit has been specially designed for the study of post-irradiation effects in a radiation-hardened CMOS technology. Preliminary results are presented here for the on-chip annealing of irradiated n-channel transistors.