Electrical and Gas Sensing Properties of Cr2O3-TiO2 Thin Films made by Pulsed Laser Deposition

2006 5th IEEE Conference on Sensors Pub Date : 2006-10-01 DOI:10.1109/ICSENS.2007.355559

R. Jaaniso, A. Gerst, A. Floren, T. Avarmaa, V. Sammelselg, H. Mandar

引用次数: 0

Abstract

Pulsed laser deposition was applied to chromia-titania solid solutions (CTO) with the aim to study electrical and gas sensing properties on (ultra)thin films of this material. The films with different compositions (5% to 33.3% of Ti from total cationic amount) were characterized by XRD, XRR, AFM, and EPMA. The electrical conductivity of the films was studied in clean air and in the presence of reducing gases (H2, CO). The gas sensitivity was found to depend strongly on growth and annealing conditions but only slightly from thickness (10-70 nm) or composition of the films prepared under similar conditions.

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脉冲激光沉积制备Cr2O3-TiO2薄膜的电感与气敏性能

将脉冲激光沉积技术应用于铬钛固溶体(CTO)中，研究了该材料(超)薄膜的电学和气敏性能。采用XRD、XRR、AFM和EPMA等手段对不同成分(Ti占总阳离子量的5% ~ 33.3%)的薄膜进行了表征。研究了薄膜在清洁空气和还原性气体(H2, CO)存在下的电导率。发现气敏性在很大程度上取决于生长和退火条件，而在类似条件下制备的薄膜的厚度(10-70 nm)或成分仅轻微影响。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2006 5th IEEE Conference on Sensors

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