Analytical modelling of bossed membrane

Abstract

In early stage of the design process, modelling is a crucial phase because it allows the designer estimating the device performance before fabrication. Very often, this phase is performed with use of FEM simulator that is usually time consuming. In many cases, especially when simple structures are used, the use of analytical model is more convenient. In this paper we present an analytical model of membrane bending containing a boss in its centre. The model concerns the membrane deflection and stress distribution in case of square and rectangular membranes.